Modeling and analysis of a SWCNT piezoresistive pressure sensor

Abstract

The paper considers modeling and analysis of a circular diaphragm Single Walled Carbon Nanotube (SWCNT) piezoresistive pressure sensor using COMSOL Multiphysics. Initially, the analysis of piezoresistivity in SWCNT by the application of strain is done both by analytical and numerical approach using MATLAB and COMSOL respectively. It is observed that both results are comparable. Thus, the analysis of the structural deformation of the piezoresistive SWCNT placed above the diaphragm which results in the change of resistance in SWCNT, which is in direct accordance with the applied pressure is performed in COMSOL Multiphysis. The simulations show that the results obtained are linear and the sensitivity of the sensor is adequate. � 2013 IEEE.