Analysis of a Chevron Beam Thermal Actuator

Abstract

Thermal MEMS (Micro-Electro-Mechanical Systems) actuators and sensors have a wide range of applications. The chevron type thermal actuators comparatively show superior performance over other existing electrostatic and thermal actuators. This paper describes the design and analysis of chevron type thermal actuator. Here standard design of Chevron type thermal actuator is considered which comprises of proof mass at center and array of six beams of a uniform cross section of 3 3 microns and an initial angle of 5�. The thermal actuator was designed and analyzed using analytical and finite element method and the results were compared. The model was also analyzed for initial angles of 2.5� and 7.5�, and the results were compared with FEA model. The cross section of the beam was varied and the finite element analysis of all three models was compared to suggest the best suitable thermal actuator structure. � Published under licence by IOP Publishing Ltd.